The scia Clean 1500 is designed for cleaning of large 3‑dimensional shaped substrates by thermal desorption, vacuum desorption and plasma treatment. Typical applications are ultra-high purity cleaning of optical components and medical objects.
The scia Clean 1500 is available with separate heating systems for the chamber and for the substrate. This ensures a very good base pressure, which is necessary to quantify even small residual contaminations on the substrate by mass-spectroscopy measurement. The cleaning is improved by a selectable quantity of plasma sources according to customer requirements. The transfer system can be used for substrates weighing up to 3 tons.