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Products & Services

scia Clean 1500

The scia Clean 1500 is designed for cleaning of large 3‑dimensional shaped substrates by thermal desorption, vacuum desorption and plasma treatment. Typical applications are ultra-high purity cleaning of optical components and medical objects.

The scia Clean 1500 is available with separate heating systems for the chamber and for the substrate. This ensures a very good base pressure, which is necessary to quantify even small residual contaminations on the substrate by mass-spectroscopy measurement. The cleaning is improved by a selectable quantity of plasma sources according to customer requirements. The transfer system can be used for substrates weighing up to 3 tons.

Seeking Equipment for R&D and Semiconductor Production

Call 0845 340 2626 or contact us online for more information Should you require information to assist you in your Equipment Purchasing or Field Service Support, please call the number above and our friendly staff will be pleased to help.
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