Aluminium chamber with 18L volume.
The Alpha Plasma System AL 18 is ideal for small-volume production, pilot line manufacturing and R&D purposes. Still important, the system will meet the full 360 degrees of today’s requirements in advanced chip packaging.
The AL 18 system is also featuring the innovative Alpha Plasma design and microwave coupling. The tool is truly versatile. Proven ECR technique is just an example from the wide range of operating modes. The classic rotary table conﬁguration is available as well.