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Products & Services

AL18 Microwave Plasma Etcher System

Description:

Aluminium chamber with 18L volume.

The Alpha Plasma System AL 18 is ideal for small-volume production, pilot line manufacturing and R&D purposes. Still important, the system will meet the full 360 degrees of today’s requirements in advanced chip packaging.

The AL 18 system is also featuring the innovative Alpha Plasma design and microwave coupling. The tool is truly versatile. Proven ECR technique is just an example from the wide range of operating modes. The classic rotary table configuration is available as well.

Applications:

  • Wire bonding
  • Die assembly applications:
  • Flip-Chip underfill
  • Improving solder ball attach

Features:

  • Efficient microwave plasma cleaning
  • Small footprint for R&D purposes
  • 2.45 GHz microwave power adjustable between 50 and 600 Watts
  • Up to 4 mass flow controllers
  • ECR Option
  • Automatic and manual operation

 

Seeking Equipment for R&D and Semiconductor Production

Call 0845 340 2626 or contact us online for more information Should you require information to assist you in your Equipment Purchasing or Field Service Support, please call the number above and our friendly staff will be pleased to help.
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