Aluminium chamber with 76L volume.
The Alpha Plasma System AL 76 / AL76 Compact are perfect all-rounders. This microwave plasma cleaner meets the full 360 degrees of today’s requirements in advanced chip packaging.
The innovative system design and microwave coupling makes the AL 76 the most productive and versatile plasma system. Proven ECR technique is just an example from the wide range of operating modes. The classic rotary table set-up is included also rounding off the system conﬁgurations.