Quartz chamber with 240mm chamber diameter and 21L volume.
Alpha Plasma Microwave Plasma Etcher Systems series provide fast and low damage plasma processing. In these plasma systems the plasma effect is based on chemical reactions of reactive plasma particles. The systems are easy to operate and feature simplest loading and unloading, manually as well as automatically.
The system software is based on Windows and complies with standards in semiconductor industries.
The microwave generators are small and reliable allowing for a compact design and thus provide a low pressure plasma system without the need for amplifiers and matching networks which are a necessary requirement for conventional RF technology. The Q Series can be prepared for installation through a cleanroom wall or as a table top. The system is suitable for wafers up to 200mm and designed for the semiconductor and microelectronic industries.
For further information on the Q240 Microwave Plasma Etcher, please call 0845 340 2626. Alternatively, please email us and someone from our friendly team will be in touch shortly.