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Products & Services

Mini Lab Plasma Pod Plus

Mini-Lab Plasma Pod Plus

Applications:

  • Dielectric materials (SiO2, SiNx, etc.);

  • Silicon-based materials (Si, a-Si, poly-Si);

  • III-V materials (GaAs, InP, GaN, etc.);

  • Sputtered metals (Au, Pt, Ti, Ta, W, etc.);

  • Diamond-like carbon (DLC);

  • Failure Analysis.


Features:

  • Small system footprint

  • Touch Screen Interface

  • Substrates up to 200mm in diameter

  • Stainless steel chamber

  • Integral Gas Box & Turbo pump

  • RF Auto-Match 


Description:

The Plasma Pod Plus System is designed specifically for R & D processes on substrates and components up to 200mm in diameter. The Plasma Pod Plus has a stainless steel chamber with a water cooled substrate electrode accessible via the pneumatically operated top electrode. The system is equipped with a PLC control unit which interfaces with the operator touch screen. This control system allows manual or automatic operation, with process recipe storage and data logging.

Ethernet connection is also available for system monitoring. Systems can be configured to suit customer requirements and specific processes.


More Information:

To enquiry about this product, please call our friendly team on 0845 340 2626, or email us and someone will be in touch shortly.

 



 

Seeking Equipment for R&D and Semiconductor Production

Call 0845 340 2626 or contact us online for more information Should you require information to assist you in your Equipment Purchasing or Field Service Support, please call the number above and our friendly staff will be pleased to help.
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