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Products & Services

Series 3000 standard

Series 3000 Standard System

Standard production tool  series 3000 with plasma support.

Modular assembly and variable chamber size distinguish this thorougly tested production- and coating machine
Made for industrial usage
Can meet large and demanding production volumes through larger chambers

Dimensions: L: 2095mm W: 800mm H: 1450mm
Weight: ~300 KG
Volume: 140 / 200 / 300 Liter
Process chamber: 500mm Ø H: 700mm (140 l), 600mm Ø / H: 7000mm  (200 l), 700m Ø H: 800mm (300l)
Plasma source: 2,45GHz, 1200 Watt
incl. 1 gas channel (gas distribution system inside the process chamber), up to 3 channels possible
Cooling system : 8 liter (electromechanical Cool-trap)
Vacuum connection: DIN 40 ISO-KF
Venting: electromagnetic solenoid valve
Pump system: 75m³/h
Electrical connection: 3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW

Seeking Equipment for R&D and Semiconductor Production

Call 0845 340 2626 or contact us online for more information Should you require information to assist you in your Equipment Purchasing or Field Service Support, please call the number above and our friendly staff will be pleased to help.
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