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scia Systems

Chemnitz, Germany

scia Systems develops ion beam and plasma process systems for nanometer-precise processing of surfaces. The products of scia Systems are used in the production of microelectronics, MEMS and precision optical components in both high volume production and research & development. Key applications are frequency and thickness trimming in the manufacture of BAW/SAW devices and multilayer coating of optics for extreme ultraviolet lithography (EUVL).

scia Systems provides highly reliable tools together with superior technical support. The tools are flexible ans modular in design. Several vacuum chamber processes can be combined inmto cluster or in -line solutions according to customer requirements.


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Products from scia Systems...


scia Mill 150
scia Mill 150

The scia Mill 150 is designed for highly uniform Ion Beam Etching and Milling of single substrates up to 150 mm...

scia Mill 200
scia Mill 200

  The scia Mill 200 is designed for highly uniform Ion Beam Etching and Milling of wafers up to 200 mm...

scia Coat 200
scia Coat 200

  The scia Coat 200 is designed for homogeneous coating of 200 mm substrates, such as wafers. Typical...

scia Coat 500
scia Coat 500

  The scia Coat 500 is designed for homogeneous coating of high precision optics. Typical applications...

scia Clean 1500
scia Clean 1500

The scia Clean 1500 is designed for cleaning of large 3‑dimensional shaped substrates by thermal desorption,...

scia Magna 200
scia Magna 200

scia Magna 200 - High uniformity at high deposition rates by Magnetron Sputtering The scia Magna 200 uses...

scia Multi 680
scia Multi 680

scia Multi 680 - Periodical multilayer coating for precision optics by Magnetron Sputtering The scia Multi 680...

scia Batch 350
scia Batch 350

scia Batch 350 – Biocompatible coatings on 3D-substrates by Plasma Enhanced Chemical Vapor Deposition The scia Batch 350...

scia Cube 300/750
scia Cube 300/750

scia Cube 300/750 - Large area etching and coating in one system by Reactive Ion Etching (RIE) and Plasma Enhanced Chemical...

Seeking Equipment for R&D and Semiconductor Production

Call 0845 340 2626 or contact us online for more information Should you require information to assist you in your Equipment Purchasing or Field Service Support, please call the number above and our friendly staff will be pleased to help.
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