SML is a positive tone organic electron beam resist that has been designed to obtain ultra high aspect ratios of more than 50:1 using high acceleration voltages. It is also 3 times more sensitive than the industry standard electron beam resist called Poly (methylmethacrylate) (PMMA).
The SML electron beam resist provides:
Ultra high resolution (sub 10nm)
Ultra high aspect ratio (10:1 @30KV & > 50:1 @ 100KV)
High metallization yields
Reduced processing time for metallization as only one resist is need
Reduces writing time as it is a sensitive resist
If you would like to enquire further about SML resist, please call us on 0845 340 2626. Alternatively, you can email us and one of our friendly team will be in touch with you shortly.