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Products & Services

scia Multi 680

scia Multi 680 - Periodical multilayer coating for precision optics
by Magnetron Sputtering

The scia Multi 680 is designed for periodic multilayer coatings for substrates up to 650 mm dia. and 50 kg. Typical applications are gradient multilayer coatings of mirrors for soft X‑ray and anti-reflective coatings in UV and X‑ray applications.

The scia Multi 680 uses 6 radially arranged sputter magnetrons, each mounted in a separate housing for individual gas supply and a defined particle emission profile. The substrate is moved across the magnetrons in a circular path in face‑down orientation by a two-phase coupled rotary drive. Each orbital rotation completes one period of the multilayer stack. Precalculating the profiles of the orbital rotation enables compensation of the individual emission profiles of the magnetrons and deposition of required gradient films along the spin rotation axis.

Seeking Equipment for R&D and Semiconductor Production

Call 0845 340 2626 or contact us online for more information Should you require information to assist you in your Equipment Purchasing or Field Service Support, please call the number above and our friendly staff will be pleased to help.
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