The scia Multi 680 is designed for periodic multilayer coatings for substrates up to 650 mm dia. and 50 kg. Typical applications are gradient multilayer coatings of mirrors for soft X‑ray and anti-reflective coatings in UV and X‑ray applications.
The scia Multi 680 uses 6 radially arranged sputter magnetrons, each mounted in a separate housing for individual gas supply and a defined particle emission profile. The substrate is moved across the magnetrons in a circular path in face‑down orientation by a two-phase coupled rotary drive. Each orbital rotation completes one period of the multilayer stack. Precalculating the profiles of the orbital rotation enables compensation of the individual emission profiles of the magnetrons and deposition of required gradient films along the spin rotation axis.