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Products & Services

Mini Lab MPS800 System

Mini Lab MPS800 System

Description:

The MPS 800 Thermal Evaporation system is configured for processing wafers and substrate up to 8 inches in diameter. Heated and cooled substrate electrode with RF bias. The system is equipped with a PLC control unit which interfaces with the operator touch screen. This control system allows manual or automatic operation, with process recipe storage and data logging. Ethernet connection is also available for system monitoring. Systems can be configured to suit customer’s requirements and specific processes. 

Application:

  • R&D thermal evaporation system

Features:

  • 8inch wafer compatibility
  • High adjustable electrodes
  • Temperature controlled electrodes
  • RF basis bias can be applied to substrate electrode

 

Seeking Equipment for R&D and Semiconductor Production

Call 0845 340 2626 or contact us online for more information Should you require information to assist you in your Equipment Purchasing or Field Service Support, please call the number above and our friendly staff will be pleased to help.
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