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Products & Services

Mini-Lab MPS500 System

Mini Lab MPS500 System

Application:

  • R&D single wafer sputter deposition system


Features:

  • Stainless steel chamber

  • 150 - 200mm diameter electrode

  • Sputter down configuration

  • Up to 4 RF/DC magnetrons

  • Substrates up to 150mm in diameter or no. or wafers/ size

  • Optional Load Lock


Description:

The Mini-Lab MPS500 series of R & D single wafer processing equipment can be designed and manufactured to suit customer specific requirements. All control equipment are is mounted within the system mainframe ensuring that the footprint is kept to a minimum.

The chamber design allows 4 RF/DC compatible magnetrons up to 6 inches in diameter to be fitted.  The system can be manufactured with Cryo or Turbo vacuum pumps.


More Information:

If you have any questions, or would like to receive further information, about the Mini-Lab MPS500 System, please call us on 0845 340 2626. Alternatively, please email us and a member of our team will be in touch shortly.


 

Seeking Equipment for R&D and Semiconductor Production

Call 0845 340 2626 or contact us online for more information Should you require information to assist you in your Equipment Purchasing or Field Service Support, please call the number above and our friendly staff will be pleased to help.
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