Gencoa’s linear Ion Sources are a robust and flexible means of pre-cleaning polymer and glass substrates prior to thin film deposition. The plasma jets generated impact the substrate to burn off hydrocarbons and activate the surface to promote adhesion of the deposited films.
A unique feature is the internal and external graphite anode which results in a very long lifetime due to the very low sputter yield of Carbon. Under normal operating conditions the anode should last for a minimum of 6 months before replacement.
The IMC75 circular ion source is easy to fit, with a 1” shaft and OD of 5” and is an ideal pair for Gencoa’s new 3” and 4” FFE Magnetrons.
The iM3000 is a complete solution. All the functions needed to operate the source are built-in and the user need only connect the high voltage cable and the MFC. The built in software can drive the external MFC to maintain the source voltage at a pre-set value.