The scia Coat 500 is designed for homogeneous coating of high precision optics. Typical applications of the system are multilayer films for X-ray mirrors and filter coatings.
The scia Coat 500 applies a beam from a linear ion beam source onto a rectangular sputter target. This linear geometry provides a good homogeneity of the deposited film in one dimension. Meanwhile, the sample is moved on a linear axis in a direction perpendicular to the beam's profile, thereby contributing to homogeneity or defined gradients of the coating in the second dimension.
In addition the sample stage is equipped with a spin rotation and a changeable shaper system (up to 4 shapers) in front of the sample stage.