The LSC-5000 is NANO-MASTER's latest reticle cleaner with state-of-art technology and functionality. With automatic robotic reticle load/unload, the LSC-5000 fully automates the cleaning process allowing a precise, uniform, and repeatable cleaning.
The LSC-5000 is capable of cleaning both the backside and the alignment marks on the front side of pelliclized masks, reducing the need for unnecessary removal and re-pelliclization of these masks. Megasonic cleaning and spin drying of the full front surface of the pelliclized mask is conducted without damage and seepage condensation on the pellicle. It is also capable of removing pellicle frame mounting adhesive and preparing surfaces for re-pelliclization.