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Products & Services

LSC-5000 Reticle Cleaning System

Pelliclized and Unpelliclized Reticle Cleaning System

The LSC-5000 is NANO-MASTER's latest reticle cleaner with state-of-art technology and functionality. With automatic robotic reticle load/unload, the LSC-5000 fully automates the cleaning process allowing a precise, uniform, and repeatable cleaning.

The LSC-5000 is capable of cleaning both the backside and the alignment marks on the front side of pelliclized masks, reducing the need for unnecessary removal and re-pelliclization of these masks. Megasonic cleaning and spin drying of the full front surface of the pelliclized mask is conducted without damage and seepage condensation on the pellicle. It is also capable of removing pellicle frame mounting adhesive and preparing surfaces for re-pelliclization.

Seeking Equipment for R&D and Semiconductor Production

Call 0845 340 2626 or contact us online for more information Should you require information to assist you in your Equipment Purchasing or Field Service Support, please call the number above and our friendly staff will be pleased to help.
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