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Products & Services

LSC 4000

NANO-MASTER's Large Substrate Cleaner (LSC) is a stand-alone cleaner which utilizes PC control for substrates up to 21" OD. A LabVIEW interface through a touch screen provides greater control compared to the SWC systems and allows for controlled access levels such as operators, process engineers, and maintenance. The LSC incorporates the same, patented megasonic technology and chemical dispenses as the SWC systems, but the combination of LabVIEW control and the larger process chamber support additional options such as ozonated water, high pressure water, pelliclized reticle cleaning, and piranha. Upon request, automatic handling with robotic load/unload configurations can be added.

Seeking Equipment for R&D and Semiconductor Production

Call 0845 340 2626 or contact us online for more information Should you require information to assist you in your Equipment Purchasing or Field Service Support, please call the number above and our friendly staff will be pleased to help.
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