Speedflo is a mult-channel closed loop control system for high speed adjustment of gases during a plasma process (eg. Sputtering, PECVD or Plasma Etch). Its advanced digital control system automatically regulates gas flow to meet the plasma process requirements.
Speedflo’s control algorithms provide significant performance improvements over conventional PID control techniques in terms of both speed and robustness.
If you would like further information on the Speedflo Reactive Gas Control product, please call us on 0845 340 2626. Alternatively, please email us and someone from our friendly team will contact you shortly.