Corrosion and chemical resistant coating
High electric strength
Low dielectric constant
Low temperature conformal deposition
Suitable for full production
Chamber size 25L and upwards
Series 3000 equipped with a plasma source and more gas lines
Maximum coating thickness 50µm
Deposition rate 3µm per hour
Pinhole free film after 0.2µm
Room temperature deposition
Fully automatic or manual control of temperature, vacuum system and gas flows
Full system visualisation display, including system status and error messages
Including automatic leak check cycle
Parylene is pin-hole free coating which is applied under vacuum, through condensation from the vapour phase and appears on the substrate as a transparent film.
For this purpose, special vacuum equipment is required. This comprises of three consecutive, aligned chambers with varying temperature and pressure conditions, which are evacuated by a rotary vane pump through a cryo trap.
The pressure difference between the respective chambers is achieved through the amount of evaporated dimer and the individual tube sections.
If you would like to receive further information about the Series 2000 / 3000 Parylene Coater product, then please call us on 0845 340 2626. Alternatively, please email us and someone from our team will be in contact shortly.