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Products & Services

Series 2000 / 3000 Parylene Coater

Series 2000-3000




  • Corrosion and chemical resistant coating

  • Electrical isolation

  • High electric strength

  • Low dielectric constant

  • Low temperature conformal deposition


  • Suitable for full production

  • Chamber size 25L and upwards

  • Series 3000 equipped with a plasma source and more gas lines

  • Maximum coating thickness 50µm

  • Deposition rate 3µm per hour

  • Pinhole free film after 0.2µm

  • Room temperature deposition

  • Fully automatic or manual control of temperature, vacuum system and gas flows

  • Full system visualisation display, including system status and error messages

  • Including automatic leak check cycle


Parylene is pin-hole free coating which is applied under vacuum, through condensation from the vapour phase and appears on the substrate as a transparent film.

For this purpose, special vacuum equipment is required. This comprises of three consecutive, aligned chambers with varying temperature and pressure conditions, which are evacuated by a rotary vane pump through a cryo trap.

The pressure difference between the respective chambers is achieved through the amount of evaporated dimer and the individual tube sections.

More Information:

If you would like to receive further information about the Series 2000 / 3000 Parylene Coater product, then please call us on 0845 340 2626. Alternatively, please email us and someone from our team will be in contact shortly. 


Seeking Equipment for R&D and Semiconductor Production

Call 0845 340 2626 or contact us online for more information Should you require information to assist you in your Equipment Purchasing or Field Service Support, please call the number above and our friendly staff will be pleased to help.
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