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Products & Services

MPS1400 RIE System

MPS 1400 ICP/RIE

Description:

The Mini-Lab MPS 1400 series of R & D single wafer processing equipment, can be designed and manufactured to suit customer specific requirements. 

All control equipment is mounted within the system mainframe ensuring that the footprint is kept to a minimum.

The modular design allows different RF sources, vacuum pumping packages and electrode configurations, to be easily incorporated into the system build.

Application:

  • R&D Single Wafer PECVD Processing System

Features:

  • Small system footprint
  • Stainless steel chamber
  • Modular design
  • 160 – 200mm electrode
  • Substrates up to 150mm in diameter
  • Optional Load Lock

Seeking Equipment for R&D and Semiconductor Production

Call 0845 340 2626 or contact us online for more information Should you require information to assist you in your Equipment Purchasing or Field Service Support, please call the number above and our friendly staff will be pleased to help.
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