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Products & Services

Mini-Lab MPS1600 System


  • R&D multi-wafer deposition or etch processing system


  • Small system footprint

  • Stainless steel chamber

  • Modular design

  • 240 – 300mm electrode

  • Substrates up to 200mm in diameter or no. or wafers/ size


The Mini-Lab MPS1600 series of R & D multi wafer processing equipment can be designed and manufactured to suit customer specific requirements.

All control equipment is mounted within the system mainframe ensuring that the footprint is kept to a minimum.

The modular design allows different RF sources, vacuum pumping packages and electrode configurations, to be easily incorporated into the system build.

More Information:

To receive further information on the Mini-Lab MPS1600 System, please call us on 0845 340 2626 or email here and someone from our friendly team will be in contact shortly.


Seeking Equipment for R&D and Semiconductor Production

Call 0845 340 2626 or contact us online for more information Should you require information to assist you in your Equipment Purchasing or Field Service Support, please call the number above and our friendly staff will be pleased to help.
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