R&D multi-wafer deposition or etch processing system
Small system footprint
Stainless steel chamber
240 – 300mm electrode
Substrates up to 200mm in diameter or no. or wafers/ size
The Mini-Lab MPS1600 series of R & D multi wafer processing equipment can be designed and manufactured to suit customer specific requirements.
All control equipment is mounted within the system mainframe ensuring that the footprint is kept to a minimum.
The modular design allows different RF sources, vacuum pumping packages and electrode configurations, to be easily incorporated into the system build.
To receive further information on the Mini-Lab MPS1600 System, please call us on 0845 340 2626 or email here and someone from our friendly team will be in contact shortly.