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Products & Services

Mini-Lab MPS1400 PECVD System



  • R&D Single Wafer PECVD Processing System


  • Small system footprint
  • Stainless steel chamber
  • Modular design
  • 160 – 200mm electrode
  • Substrates up to 150mm in diameter
  • Optional Load Lock


The Mini-Lab MPS1400 series of R & D single wafer processing equipment, can be designed and manufactured to suit customer specific requirements. 

All control equipment is mounted within the system mainframe ensuring that the footprint is kept to a minimum.

The modular design allows different RF sources, vacuum pumping packages and electrode configurations, to be easily incorporated into the system build.

More Information:

If you have any questions about the Mini-Lab MPS1400 PECVD System, or need any further information, please call us on 0845 340 2626 or email us.


Seeking Equipment for R&D and Semiconductor Production

Call 0845 340 2626 or contact us online for more information Should you require information to assist you in your Equipment Purchasing or Field Service Support, please call the number above and our friendly staff will be pleased to help.
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