R&D single-wafer high temperature processing system
Small system footprint
Stainless steel chamber
160 – 200mm electrode
Substrates up to 150mm in diameter or no. or wafers/ size
Optional Load Lock
Heated electrode to 1000°C
The Mini-Lab MPS1400 series of R&D single wafer processing equipment can be designed and manufactured to suit customer specific requirements. All control equipment is mounted within the system mainframe ensuring that the footprint is kept to a minimum.
The modular design allows different RF sources, vacuum pumping packages and electrode configurations to be easily incorporated into the system build.
To find out more about the Mini-Lab MPS1400 HT product, please call us on 0845 340 2626. Alternatively, email us and someone from our friendly team will be in contact shortly.