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Products & Services

Mini-Lab MPS1200 System

Mini-Lab MPS1200 System

Application:

  • R&D single wafer deposition or etch processing system


Features:

  • Small system footprint

  • Heated stainless steel chamber

  • Modular design

  • 160 – 200mm electrode

  • Substrates up to 150mm in diameter


Description:

The Mini-Lab MPS1200 series of R & D single wafer processing equipment can be designed and manufactured to suit customer specific requirements. All control equipment is mounted within the system mainframe ensuring that the footprint is kept to a minimum.

The modular design allows different RF sources, vacuum pumping packages and electrode configurations to be easily incorporated into the system build.


More Information:

To receive further information about the Mini-Lab MPS1200 System, please call 0845 340 2626. Alternatively, email us and one of our friendly team will be in touch shortly.

 

Seeking Equipment for R&D and Semiconductor Production

Call 0845 340 2626 or contact us online for more information Should you require information to assist you in your Equipment Purchasing or Field Service Support, please call the number above and our friendly staff will be pleased to help.
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